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Proceedings Paper

Scanning probe microscopy and how it can be utilized in the manufacture of diffraction gratings
Author(s): Bernhard W. Bach
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Paper Abstract

Ruled diffraction gratings and even holographic ones have a `surface texture' or an `inherent roughness' that is part of the grating making process. Using the new scanning probe microscopy (SPM), we can now see the structure that has been long suspected but not revealed using scanning electron microscopy. Also using the SPM, we can review the surface structure in the film prior to ruling as well as after. Gaining this experience, we have been able to make adjustments to the diamond tool and weight to improve the final products.

Paper Details

Date Published: 22 November 1996
PDF: 5 pages
Proc. SPIE 2856, Optics for High-Brightness Synchrotron Radiation Beamlines II, (22 November 1996); doi: 10.1117/12.259873
Show Author Affiliations
Bernhard W. Bach, Hyperfine Inc. (United States)


Published in SPIE Proceedings Vol. 2856:
Optics for High-Brightness Synchrotron Radiation Beamlines II
Lonny E. Berman; John Arthur, Editor(s)

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