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Proceedings Paper

Chemical-vapor-deposited SiC for high heat flux applications
Author(s): Jitendra Singh Goela; Michael A. Pickering; Lee E. Burns
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Paper Abstract

Important properties and applications of CVD SILICON CARBIDETM with particular emphasis on high heat loads are reviewed. Data on the mechanical and thermal properties of CVD-SiC as function of temperature are presented. Further, the effect of different high temperature treatments on flexural strength of CVD-SiC is discussed and the thermal shock resistance of CVD-SiC is compared to other competing materials. Finally, several high heat flux applications in the areas of optics, semiconductor processing and wear parts are discussed.

Paper Details

Date Published: 21 November 1996
PDF: 12 pages
Proc. SPIE 2855, High Heat Flux Engineering III, (21 November 1996); doi: 10.1117/12.259820
Show Author Affiliations
Jitendra Singh Goela, Morton Advanced Materials (United States)
Michael A. Pickering, Morton Advanced Materials (United States)
Lee E. Burns, Morton Advanced Materials (United States)

Published in SPIE Proceedings Vol. 2855:
High Heat Flux Engineering III
Ali M. Khounsary, Editor(s)

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