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Proceedings Paper

Thomson scattering diagnostics of discharge plasmas in an excimer laser
Author(s): H. Yamakoshi; Motoko Kato; Y. Kubo; H. Enokizono; Kenji Uchino; Katsunori Muraoka; A. Takahashi; Mitsuo Maeda
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Paper Abstract

The electron-velocity distribution function of the discharge plasma in a rare gas halide excimer laser was diagnosed by the Thomson scattering method. The measured electron-velocity distribution function shows that the predicted value by the calculation is accurate. Those results assure that the calculation method which is based on the kinetic calculation using the circuit equations, the Boltzmann equation and the rate equations is effective in the excimer laser simulation.

Paper Details

Date Published: 1 February 1991
PDF: 4 pages
Proc. SPIE 1397, 8th Intl Symp on Gas Flow and Chemical Lasers, (1 February 1991); doi: 10.1117/12.25951
Show Author Affiliations
H. Yamakoshi, Mitsubishi Heavy Industries, Ltd. (Japan)
Motoko Kato, Mitsubishi Heavy Industries, Ltd. (Japan)
Y. Kubo, Kyushu Univ. (Japan)
H. Enokizono, Kyushu Univ. (Japan)
Kenji Uchino, Kyushu Univ. (Japan)
Katsunori Muraoka, Kyushu Univ. (Japan)
A. Takahashi, Fukuoka Univ. (Japan)
Mitsuo Maeda, Kyushu Univ. (Japan)


Published in SPIE Proceedings Vol. 1397:
8th Intl Symp on Gas Flow and Chemical Lasers

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