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Proceedings Paper

Excimer and nitrogen lasers with low-average power for technology applications
Author(s): Ludwik Jerzy Pokora
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Paper Abstract

For the last few years applications of excimer lasers in technological processes aroused more and more interest. It is due to many unique UV radiation parameters of those lasers. The most important of the parameters are: ability of focusing on very small area, low diffraction in lithographic processes, non-thermal (cold) nature of interreaction with materials, significant absorptivity for most of metals.

Paper Details

Date Published: 1 February 1991
PDF: 4 pages
Proc. SPIE 1397, 8th Intl Symp on Gas Flow and Chemical Lasers, (1 February 1991); doi: 10.1117/12.25946
Show Author Affiliations
Ludwik Jerzy Pokora, Institute of Quantum Electronics (Poland)


Published in SPIE Proceedings Vol. 1397:
8th Intl Symp on Gas Flow and Chemical Lasers
Concepcion Maroto Domingo; Jose M. Orza, Editor(s)

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