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Proceedings Paper

Research of nondestructive detecton of microbulk defects in materials
Author(s): Zheng You; Junbo Chen; Yang Ren
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Paper Abstract

In this paper, after having established a mathematical modeling of detecting micro bulk defects by Mie scattering theory, a novel way called near infrared laser scanning tomography (LST) technique is developed that can detect micro bulk defects in Si-based materials and has the advantages of high resolution and high contrast. Simulating experiments on micro bulk defects in glass are implemented and scattered graphs collected in the direction vertical to the incident light are processed in order to prove the rightness of the modeling. Satisfactory results are achieved which demonstrates that the scattering modeling is correct and that the LST non-destructive detection of micro bulk defects technique is feasible.

Paper Details

Date Published: 15 November 1996
PDF: 7 pages
Proc. SPIE 2944, Nondestructive Evaluation of Materials and Composites, (15 November 1996); doi: 10.1117/12.259043
Show Author Affiliations
Zheng You, Tsinghua Univ. (China)
Junbo Chen, Tsinghua Univ. (China)
Yang Ren, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 2944:
Nondestructive Evaluation of Materials and Composites
Steven R. Doctor; Carol A. Nove; George Y. Baaklini, Editor(s)

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