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Proceedings Paper

Stability analysis of optomechanical components
Author(s): Esther Kerbis; Rick L. Morrison; Thomas J. Cloonan; Maralene M. Downs
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Paper Abstract

We have developed two methods for thermal and mechanical stability analysis of optical mounts and components. The methods are capable of detecting movements on the order of 1 pm. We present a description and evaluation of the two methods along with analysis results of a 3-axis positioning stage. 1.

Paper Details

Date Published: 1 March 1991
PDF: 6 pages
Proc. SPIE 1396, Applications of Optical Engineering: Proceedings of OE/Midwest '90, (1 March 1991); doi: 10.1117/12.25844
Show Author Affiliations
Esther Kerbis, AT&T Bell Labs. (United States)
Rick L. Morrison, AT&T Bell Labs. (United States)
Thomas J. Cloonan, AT&T Bell Labs. (United States)
Maralene M. Downs, AT&T Bell Labs. (United States)

Published in SPIE Proceedings Vol. 1396:
Applications of Optical Engineering: Proceedings of OE/Midwest '90
Rudolph P. Guzik; Hans E. Eppinger; Richard E. Gillespie; Mary Kathryn Dubiel; James E. Pearson, Editor(s)

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