Share Email Print
cover

Proceedings Paper

New correction method for FTIR online film-thickness measurement
Author(s): Dongsheng Wang; Yunping Yang; Jizuo Zou
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In FTIR film thickness measurement system, traditional process for determining film thickness is optical interference method or absorption method. In practice, both interference effect and absorption effect make a partial contribution to spectrum respectively. When both of the tow effects have influence on measurement, neither interference method nor absorption method can be individually used to determine the film thickness accurately. A new mathematical correction method is described for FTIR film thickness measurement in this case. Employing this new mathematical correction method, the effects of interference and absorption can be apart form each other effectively. The film thickness measurement accuracy of (lambda) /100 has been achieved.

Paper Details

Date Published: 11 November 1996
PDF: 9 pages
Proc. SPIE 2857, Advanced Materials for Optical and Precision Structures, (11 November 1996); doi: 10.1117/12.258292
Show Author Affiliations
Dongsheng Wang, Tsinghua Univ. (China)
Yunping Yang, Tsinghua Univ. (China)
Jizuo Zou, Tsinghua Univ. (United States)


Published in SPIE Proceedings Vol. 2857:
Advanced Materials for Optical and Precision Structures
Mark A. Ealey, Editor(s)

© SPIE. Terms of Use
Back to Top