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Proceedings Paper

Lau imaging
Author(s): Steven L. Cartwright
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Paper Abstract

Gratings may be used to form images of objects illuminated with incoherent light. Under certain restrictions the object is either replicated in the image or a single filtered image is formed. This latter case has applications in microlithography. 1.

Paper Details

Date Published: 1 March 1991
PDF: 7 pages
Proc. SPIE 1396, Applications of Optical Engineering: Proceedings of OE/Midwest '90, (1 March 1991); doi: 10.1117/12.25788
Show Author Affiliations
Steven L. Cartwright, Environmental Research Institute of Michigan (United States)


Published in SPIE Proceedings Vol. 1396:
Applications of Optical Engineering: Proceedings of OE/Midwest '90
Rudolph P. Guzik; Hans E. Eppinger; Richard E. Gillespie; Mary Kathryn Dubiel; James E. Pearson, Editor(s)

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