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Proceedings Paper

High-speed electron beam data verification system using high-performance neural network accelerator board
Author(s): Toshiyuki Tamura; Dominique Bouchon; Pierre Fournier; Koichi Moriizumi; Ken-ichi Tanaka; Kazuo Kyuma
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Paper Abstract

We have developed a high speed automatic inspection system which verifies the validity of electron beam exposure data used for fabrication of VLSI photomasks. By employing neural network accelerator board and adopting a flexible verification scheme based on parallel processing, the system performs 100 times faster than the previous system running on a general purpose workstation. In this paper, the architecture of this system and some salient techniques implemented in the system are presented.

Paper Details

Date Published: 31 October 1996
PDF: 6 pages
Proc. SPIE 2908, Machine Vision Applications, Architectures, and Systems Integration V, (31 October 1996); doi: 10.1117/12.257257
Show Author Affiliations
Toshiyuki Tamura, Mitsubishi Electric Corp. (Japan)
Dominique Bouchon, Mitsubishi Electric Corp. (Japan)
Pierre Fournier, Mitsubishi Electric Corp. (Japan)
Koichi Moriizumi, Mitsubishi Electric Corp. (Japan)
Ken-ichi Tanaka, Mitsubishi Electric Corp. (Japan)
Kazuo Kyuma, Mitsubishi Electric Corp. (Japan)

Published in SPIE Proceedings Vol. 2908:
Machine Vision Applications, Architectures, and Systems Integration V
Susan Snell Solomon; Bruce G. Batchelor; Frederick M. Waltz, Editor(s)

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