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Proceedings Paper

RTP temperature uniformity mapping
Author(s): W. Andrew Keenan; Walter H. Johnson; David T. Hodul; David Mordo
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Paper Details

Date Published: 1 April 1991
PDF: 12 pages
Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); doi: 10.1117/12.25718
Show Author Affiliations
W. Andrew Keenan, Prometrix Corp. (United States)
Walter H. Johnson, Prometrix Corp. (United States)
David T. Hodul, Varian Research Ctr. (United States)
David Mordo, AG Associates (United States)


Published in SPIE Proceedings Vol. 1393:
Rapid Thermal and Related Processing Techniques
Rajendra Singh; Mehrdad M. Moslehi, Editor(s)

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