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Proceedings Paper

Pyrometer modeling for rapid thermal processing
Author(s): Samuel C. Wood; Pushkar P. Apte; Tsu-Jae King; Mehrdad M. Moslehi; Krishna C. Saraswat
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Paper Details

Date Published: 1 April 1991
PDF: 12 pages
Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); doi: 10.1117/12.25716
Show Author Affiliations
Samuel C. Wood, Stanford Univ. (United States)
Pushkar P. Apte, Stanford Univ. (United States)
Tsu-Jae King, Stanford Univ. (United States)
Mehrdad M. Moslehi, Texas Instruments Inc. (United States)
Krishna C. Saraswat, Stanford Univ. (United States)


Published in SPIE Proceedings Vol. 1393:
Rapid Thermal and Related Processing Techniques
Rajendra Singh; Mehrdad M. Moslehi, Editor(s)

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