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Proceedings Paper

Emissivity of silicon wafers during rapid thermal processing
Author(s): Peter Vandenabeele; Karen Maex
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Paper Details

Date Published: 1 April 1991
PDF: 21 pages
Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); doi: 10.1117/12.25715
Show Author Affiliations
Peter Vandenabeele, Interuniversity Microelectronic Ctr. (Belgium)
Karen Maex, Interuniversity Microelectronic Ctr. (Belgium)

Published in SPIE Proceedings Vol. 1393:
Rapid Thermal and Related Processing Techniques
Rajendra Singh; Mehrdad M. Moslehi, Editor(s)

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