Share Email Print

Proceedings Paper

Emissivity of silicon wafers during rapid thermal processing
Author(s): Peter Vandenabeele; Karen Maex
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Details

Date Published: 1 April 1991
PDF: 21 pages
Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); doi: 10.1117/12.25715
Show Author Affiliations
Peter Vandenabeele, Interuniversity Microelectronic Ctr. (Belgium)
Karen Maex, Interuniversity Microelectronic Ctr. (Belgium)

Published in SPIE Proceedings Vol. 1393:
Rapid Thermal and Related Processing Techniques
Rajendra Singh; Mehrdad M. Moslehi, Editor(s)

© SPIE. Terms of Use
Back to Top