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Proceedings Paper

Fundamental mechanisms and doping effects in silicon infrared absorption for temperature measurement by infrared transmission
Author(s): James C. Sturm; Casper M. Reaves
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Paper Details

Date Published: 1 April 1991
PDF: 7 pages
Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); doi: 10.1117/12.25714
Show Author Affiliations
James C. Sturm, Princeton Univ. (United States)
Casper M. Reaves, Princeton Univ. (United States)


Published in SPIE Proceedings Vol. 1393:
Rapid Thermal and Related Processing Techniques
Rajendra Singh; Mehrdad M. Moslehi, Editor(s)

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