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Proceedings Paper

Systems-oriented survey of noncontact temperature measurement techniques for rapid thermal processing
Author(s): David Peyton; Hiroyuki Kinoshita; G. Q. Lo; Dim-Lee Kwong
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Paper Details

Date Published: 1 April 1991
PDF: 14 pages
Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); doi: 10.1117/12.25713
Show Author Affiliations
David Peyton, Univ. of Texas/Austin (United States)
Hiroyuki Kinoshita, Univ. of Texas/Austin (United States)
G. Q. Lo, Univ. of Texas/Austin (United States)
Dim-Lee Kwong, Univ. of Texas/Austin (United States)


Published in SPIE Proceedings Vol. 1393:
Rapid Thermal and Related Processing Techniques
Rajendra Singh; Mehrdad M. Moslehi, Editor(s)

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