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Proceedings Paper

Control of oxygen incorporation and lifetime measurement in Si1-xGex epitaxial films grown by rapid thermal chemical vapor deposition
Author(s): James C. Sturm; P. V. Schwartz; Erwin J. Prinz; Charles W. Magee
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Paper Details

Date Published: 1 April 1991
PDF: 8 pages
Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); doi: 10.1117/12.25710
Show Author Affiliations
James C. Sturm, Princeton Univ. (United States)
P. V. Schwartz, Princeton Univ. (United States)
Erwin J. Prinz, Princeton Univ. (United States)
Charles W. Magee, Evans East, Inc. (United States)

Published in SPIE Proceedings Vol. 1393:
Rapid Thermal and Related Processing Techniques
Rajendra Singh; Mehrdad M. Moslehi, Editor(s)

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