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Proceedings Paper

Low-resistivity contacts to silicon using selective RTCVD of germanium
Author(s): D. T. Grider; Mehmet C. Ozturk; Jim J. Wortman; Michael A. Littlejohn; Y. Zhong
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Paper Details

Date Published: 1 April 1991
PDF: 11 pages
Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); doi: 10.1117/12.25708
Show Author Affiliations
D. T. Grider, North Carolina State Univ. (United States)
Mehmet C. Ozturk, North Carolina State Univ. (United States)
Jim J. Wortman, North Carolina State Univ. (United States)
Michael A. Littlejohn, North Carolina State Univ. (United States)
Y. Zhong, North Carolina State Univ. (United States)


Published in SPIE Proceedings Vol. 1393:
Rapid Thermal and Related Processing Techniques
Rajendra Singh; Mehrdad M. Moslehi, Editor(s)

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