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Proceedings Paper

Multiple photo-assisted CVD of thin-film materials for III-V device technology
Author(s): Yves I. Nissim; Jean Marie Moison; Francoise Houzay; F. Lebland; C. Licoppe; M. Bensoussan
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Paper Details

Date Published: 1 April 1991
PDF: 13 pages
Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); doi: 10.1117/12.25707
Show Author Affiliations
Yves I. Nissim, Lab. de Bagneux/CNET (France)
Jean Marie Moison, Lab. de Bagneux/CNET (France)
Francoise Houzay, Lab. de Bagneux/CNET (France)
F. Lebland, Lab. de Bagneux/CNET (France)
C. Licoppe, Lab. de Bagneux/CNET (France)
M. Bensoussan, Lab. de Bagneux/CNET (France)


Published in SPIE Proceedings Vol. 1393:
Rapid Thermal and Related Processing Techniques
Rajendra Singh; Mehrdad M. Moslehi, Editor(s)

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