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Proceedings Paper

Rapid thermal processing induced defects and gettering effects in silicon
Author(s): Bouchaib BH Hartiti; Jean-Claude Muller; Paul Siffert; Thuong-Quat Vu
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Paper Details

Date Published: 1 April 1991
PDF: 7 pages
Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); doi: 10.1117/12.25705
Show Author Affiliations
Bouchaib BH Hartiti, Ctr. de Recherches Nucleaires (France)
Jean-Claude Muller, Ctr. de Recherches Nucleaires (France)
Paul Siffert, Ctr. de Recherches Nucleaires (France)
Thuong-Quat Vu, California Institute of Technology (United States)

Published in SPIE Proceedings Vol. 1393:
Rapid Thermal and Related Processing Techniques
Rajendra Singh; Mehrdad M. Moslehi, Editor(s)

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