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Proceedings Paper

Anomalous diffusion phenomena in two-step rapid thermal diffusion of phosphorus
Author(s): Byung-Jin Cho; Choong-Ki Kim
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Paper Details

Date Published: 1 April 1991
PDF: 12 pages
Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); doi: 10.1117/12.25703
Show Author Affiliations
Byung-Jin Cho, Korea Advanced Institute of Science and Technology (South Korea)
Choong-Ki Kim, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 1393:
Rapid Thermal and Related Processing Techniques
Rajendra Singh; Mehrdad M. Moslehi, Editor(s)

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