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Proceedings Paper

Rapid thermal annealing of the through-Ta5Si3 film implantation on GaAs
Author(s): Fon-Shan Huang; W. S. Chen; Tzu-min Hsu
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Paper Details

Date Published: 1 April 1991
PDF: 8 pages
Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); doi: 10.1117/12.25702
Show Author Affiliations
Fon-Shan Huang, National Tsing-Hua Univ. (Taiwan)
W. S. Chen, National Tsing-Hua Univ. (Taiwan)
Tzu-min Hsu, National Central Univ. (Taiwan)


Published in SPIE Proceedings Vol. 1393:
Rapid Thermal and Related Processing Techniques
Rajendra Singh; Mehrdad M. Moslehi, Editor(s)

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