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Proceedings Paper

High-temperature degradation-free rapid thermal annealing of GaAs and InP
Author(s): Stephen J. Pearton; Avishay Katz; Michael Geva
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Paper Details

Date Published: 1 April 1991
PDF: 11 pages
Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); doi: 10.1117/12.25699
Show Author Affiliations
Stephen J. Pearton, AT&T Bell Labs. (United States)
Avishay Katz, AT&T Bell Labs. (United States)
Michael Geva, AT&T Bell Labs. (United States)

Published in SPIE Proceedings Vol. 1393:
Rapid Thermal and Related Processing Techniques
Rajendra Singh; Mehrdad M. Moslehi, Editor(s)

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