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Proceedings Paper

Rapid thermal processing in the manufacturing technology of contacts to InP-based photonic devices
Author(s): Avishay Katz
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Paper Details

Date Published: 1 April 1991
PDF: 11 pages
Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); doi: 10.1117/12.25692
Show Author Affiliations
Avishay Katz, AT&T Bell Labs. (United States)


Published in SPIE Proceedings Vol. 1393:
Rapid Thermal and Related Processing Techniques
Rajendra Singh; Mehrdad M. Moslehi, Editor(s)

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