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Proceedings Paper

Multichamber rapid thermal processing
Author(s): Paul J. Rosser; P. Moynagh; Kevin B. Affolter
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Paper Details

Date Published: 1 April 1991
PDF: 18 pages
Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); doi: 10.1117/12.25691
Show Author Affiliations
Paul J. Rosser, STC Technology Ltd. (United Kingdom)
P. Moynagh, STC Technology Ltd. (United Kingdom)
Kevin B. Affolter, STC Technology Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 1393:
Rapid Thermal and Related Processing Techniques
Rajendra Singh; Mehrdad M. Moslehi, Editor(s)

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