Share Email Print
cover

Proceedings Paper

Scatterometry for machine vision
Author(s): Jerry Volcy; Stephen L. Dickerson
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Specifications and design are provided for a low-cost scatterometer build to study the relationship between optical scatter and image formation. Design principles and considerations are discussed as they relate to digital imaging. Specifications and instrument limitations both mechanical and optical are examined and certain design choices are explained. The process of calibrating the instrument is considered and methods of noise suppression both electronic and optical are discussed. Finally, some measured data is presented.

Paper Details

Date Published: 29 October 1996
PDF: 12 pages
Proc. SPIE 2904, Intelligent Robots and Computer Vision XV: Algorithms, Techniques,Active Vision, and Materials Handling, (29 October 1996); doi: 10.1117/12.256308
Show Author Affiliations
Jerry Volcy, Georgia Institute of Technology (United States)
Stephen L. Dickerson, Georgia Institute of Technology (United States)


Published in SPIE Proceedings Vol. 2904:
Intelligent Robots and Computer Vision XV: Algorithms, Techniques,Active Vision, and Materials Handling
David P. Casasent, Editor(s)

© SPIE. Terms of Use
Back to Top