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Proceedings Paper

Dynamic angle measurement using an acousto-optic deflector
Author(s): LiJiang Zeng; Takeshi Ohnuki; Hirokazu Matsumoto; Keiji Kawachi
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Paper Abstract

A scanning beam collimation (SBC) method is developed for measuring dynamic angle variations in which an acousto-optic deflector is used as a diffractive scanner to compensate the angle variation in real time, and a position sensor is used to detect the position of the beam that is reflected from the reflector (i.e., object) to be measured. The angle variation can be measured at high speed due to the very high scanning speed available in the acousto-optic deflector. There was good agreement between the angle variation measured using the SBC method and that using a conventional electronic autocollimator. The repeatability, resolution, and linearity of the scanning beam collimation method were determined using a piezo translator to generate tilt angle; the results showing that high accuracy also can be achieved in dynamic angle variation measurement. The SBC method was applied to measure the tilt angle variation caused by the beating force of a dragonfly attached to one end of a gauge block. The results confirmed the effectiveness of this new method.

Paper Details

Date Published: 1 November 1996
PDF: 9 pages
Proc. SPIE 2863, Current Developments in Optical Design and Engineering VI, (1 November 1996); doi: 10.1117/12.256246
Show Author Affiliations
LiJiang Zeng, Research Development Corp. of Japan (China)
Takeshi Ohnuki, Research Development Corp. of Japan (Japan)
Hirokazu Matsumoto, National Research Lab. of Metrology (Japan)
Keiji Kawachi, Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 2863:
Current Developments in Optical Design and Engineering VI
Robert E. Fischer; Warren J. Smith, Editor(s)

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