Share Email Print
cover

Proceedings Paper

Method to improve the accuracy of super-smooth surface scatter data
Author(s): Yoshitate Takakura; Mohamed Tahar Sehili; Patrick Meyrueis
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

An approach to increase the signal-to-noise ratio of the scatter data (hence its accuracy) when studying super-smooth surfaces is proposed. It consists of increasing the power of the illuminating source. Since stray scattering is no longer negligible in such an operation, a solution to alter the instrument signature is given. To prove their stability, the cross section data from a silicon carbide mirror are used in a singular manner to extract roughness parameters mainly the root mean square roughness and the correlation length. Results are satisfactory as they feature low dispersion and are consistent with the approximation used.

Paper Details

Date Published: 4 November 1996
PDF: 9 pages
Proc. SPIE 2862, Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (4 November 1996); doi: 10.1117/12.256207
Show Author Affiliations
Yoshitate Takakura, Univ. Louis Pasteur (France)
Mohamed Tahar Sehili, Univ. Louis Pasteur (France)
Patrick Meyrueis, Univ. Louis Pasteur (France)


Published in SPIE Proceedings Vol. 2862:
Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays
John C. Stover, Editor(s)

© SPIE. Terms of Use
Back to Top