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Proceedings Paper

Instrument for measuring flatness by using laser and CCD
Author(s): Qun Hao; Mang Cao; Dacheng Li
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Paper Abstract

In this paper, an instrument for measuring flatness derivation by using an aligned laser beam and CCD detector is described. A stable aligned laser beam is used to form a datum plane in the instrument by rotating shaft and a pentagonal prism. Using a linear array CCD detector as the sensing probe, the system can detect the deviation of height related to the datum plane directly and absolutely. The experiment result shows that the measurement accuracy ofthe instrument is 2.3x r6. Keyword: Flatness, Laser beam, CCD detector

Paper Details

Date Published: 4 November 1996
PDF: 4 pages
Proc. SPIE 2862, Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (4 November 1996); doi: 10.1117/12.256203
Show Author Affiliations
Qun Hao, Tsinghua Univ. (China)
Mang Cao, Tsinghua Univ. (China)
Dacheng Li, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 2862:
Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays
John C. Stover, Editor(s)

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