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Proceedings Paper

Comparison of experimentally measured differential scattering cross sections of PSL spheres on flat surfaces and patterned surfaces
Author(s): Greg W. Starr; E. Dan Hirleman
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Paper Abstract

While angle-resolved scatter has been extensively investigated for particles on smooth and rough semiconductor surfaces by Bawolek and Warner, similar fundamental studies for particles on patterned surfaces are quite limited. In this paper we report results of research on the effects of adjacent surface features (simulating IC patterns) on scattering by particles. Experimental measurements of angle- resolved scattering signatures of individual submicron particles on a test wafer are presented. In particular, the effects of the relative position of the particle with respect to the pattern are shown. The results provide some fundamental insight into the potential particle sizing errors associated with particle detection on patterned surfaces.

Paper Details

Date Published: 4 November 1996
PDF: 9 pages
Proc. SPIE 2862, Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (4 November 1996); doi: 10.1117/12.256197
Show Author Affiliations
Greg W. Starr, Arizona State Univ. (United States)
E. Dan Hirleman, Arizona State Univ. (United States)


Published in SPIE Proceedings Vol. 2862:
Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays
John C. Stover, Editor(s)

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