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Proceedings Paper

Requirements and suggestions for an industrial smooth surface microroughness standards
Author(s): John C. Stover
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Paper Abstract

A number of physical standards are available for the measurement of surface roughness, but none of them are applicable to use with the very smooth surfaces being manufactured in the semiconductor, computer disk and flat panel display industries. This paper reviews some of the issues and suggests possible approaches for realizing such standards. Suggestions include grating like surfaces, very square steps and isotropic (polished) silicon.

Paper Details

Date Published: 4 November 1996
PDF: 9 pages
Proc. SPIE 2862, Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (4 November 1996); doi: 10.1117/12.256192
Show Author Affiliations
John C. Stover, ADE Optical Systems (United States)


Published in SPIE Proceedings Vol. 2862:
Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays
John C. Stover, Editor(s)

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