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Proceedings Paper

Optical properties of immersion objective lenses and collimation of secondary electrons in low-voltage SEM
Author(s): Katsushige Tsuno; Nobuo Handa; Sunao Matsumoto; A. Mogami
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Paper Abstract

Optical properties of two kinds of immersion lenses, i.e. the radial gap magnetic lens and the combined electric and magnetic field lens have been compared. When the specimen allows the application of a leakage electric field about 600 V and the accelerating voltage on the specimen is lower than 2 kV, the combined field lens is better than the radial gap lens, because the spherical and chromatic aberration coefficients are small and the collimation efficiency of secondary electrons is perfect. However, if the leakage electric field is not allowed, the radial gap lens is superior to the combined field lens. In the case of the radial gap lens, a weak electric field has to be applied to the specimen for collimating electrons emitted with large angle from the specimen. When the specimen is set lower than the magnetic field maximum position, a solenoid coil placed inside the yoke of the lens is useful to bring up the off axial electrons.

Paper Details

Date Published: 25 October 1996
PDF: 12 pages
Proc. SPIE 2858, Charged-Particle Optics II, (25 October 1996); doi: 10.1117/12.255512
Show Author Affiliations
Katsushige Tsuno, JEOL Ltd. (Japan)
Nobuo Handa, JEOL Ltd. (Japan)
Sunao Matsumoto, JEOL Ltd. (Japan)
A. Mogami, JEOL Ltd. (Japan)

Published in SPIE Proceedings Vol. 2858:
Charged-Particle Optics II
Eric Munro, Editor(s)

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