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Proceedings Paper

Vertical 3-D integration of silicon waveguides in a Si-SiO2-Si-SiO2-Si structure
Author(s): Richard A. Soref; Fereydoon Namavar; Elisabetta Cortesi; Lionel R. Friedman; Richard Lareau
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Paper Details

Date Published: 1 April 1991
PDF: 14 pages
Proc. SPIE 1389, Microelectronic Interconnects and Packages: Optical and Electrical Technologies, (1 April 1991); doi: 10.1117/12.25543
Show Author Affiliations
Richard A. Soref, Rome Lab. (United States)
Fereydoon Namavar, Spire Corp. (United States)
Elisabetta Cortesi, Spire Corp. (United States)
Lionel R. Friedman, Worcester Polytechnic Institute (United States)
Richard Lareau, Worcester Polytechnic Institute (United States)


Published in SPIE Proceedings Vol. 1389:
Microelectronic Interconnects and Packages: Optical and Electrical Technologies
Gnanalingam Arjavalingam; James Pazaris, Editor(s)

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