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Proceedings Paper

Piezoresistive microcantilever optimization for uncooled infrared detection technology
Author(s): Slobodan Rajic; Boyd M. Evans; Panos G. Datskos; Patrick Ian Oden; Thomas G. Thundat; Charles M. Egert
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Paper Abstract

Uncooled infrared sensors are significant in a number of scientific and technological applications. A new approach to uncooled infrared detectors has been developed using piezoresistive microcantilevers coated with thermal energy absorbing material(s). Infrared radiation absorbed by the microcantilever detector can be sensitively detected as changes in the electrical resistance as a function of microcantilever bending. These devices have demonstrated sensitivities comparable to existing uncooled thermal detector technologies. The dynamic range of these devices is extremely large due to measurable resistance change obtained with only nanometer level cantilever displacement. Optimization of geometrical properties for selected commercially available cantilevers is presented. Additionally, we present results obtained from a modeling analysis of the thermal properties of several different microcantilever detector architectures.

Paper Details

Date Published: 21 October 1996
PDF: 8 pages
Proc. SPIE 2817, Infrared Spaceborne Remote Sensing IV, (21 October 1996); doi: 10.1117/12.255182
Show Author Affiliations
Slobodan Rajic, Oak Ridge National Lab. (United States)
Boyd M. Evans, Oak Ridge National Lab. (United States)
Panos G. Datskos, Oak Ridge National Lab. and Univ. of Tennessee (United States)
Patrick Ian Oden, Oak Ridge National Lab. and Univ. of Tennessee (United States)
Thomas G. Thundat, Oak Ridge National Lab. (United States)
Charles M. Egert, Oak Ridge National Lab. (United States)


Published in SPIE Proceedings Vol. 2817:
Infrared Spaceborne Remote Sensing IV
Marija S. Scholl; Bjorn F. Andresen, Editor(s)

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