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Subwavelength periodic nanostructures fabricated by femtosecond laser in metal, dielectric and metal-dielectric-metal coating
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Paper Abstract

Subwavelength periodic nanostructures on metal, dielectric or metal-dielectric-metal coating were fabricated by femtosecond laser. Circular apertures with diameter of ~0.6μm and a lattice period of 1.0 and 2.0 um were fabricated by single laser pulse irradiation. Surface geometries of nanostructure unit on the three kinds of coatings were compared using the scanning electron microscope and atomic force microscope. Moreover, the nanostructure units fabricated by front-side ablation technique and back-side ablation technique were compared. The minimum diameter of the circular aperture fabricated both by front-side ablation technique and back-side ablation technique could reach approximate 300 nm. By studying mechanisms of femtosecond laser interaction with metal films and dielectric films, it’s found that metal layers dominate femtosecond laser interaction with metal-dielectric-metal sandwich type coatings. It’s also found that the edges of apertures fabricated by back-side ablation technique in metal coatings and metal-dielectric-metal coatings are more regular and round than those fabricated by front-side ablation technique. Femtosecond laser fabrication therefore provides possibilities for maskless and speedy fabrication of fishnet structures which exhibit negative refractive index at optical frequencies.

Paper Details

Date Published: 8 July 2019
PDF: 7 pages
Proc. SPIE 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019), 110640F (8 July 2019); doi: 10.1117/12.2540704
Show Author Affiliations
Kaixin Zhang, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Key Lab. of Materials for High Power Laser (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)
Key Lab. of Materials for High Power Laser (China)
Guohang Hu, Shanghai Institute of Optics and Fine Mechanics (China)
Key Lab. of Materials for High Power Laser (China)
Maria Luisa Grilli, Italian National Agency for New Technologies, Energy and Sustainable Economic Development (ENEA) (Italy)
Angela Piegari, ENEA (Italy)
Zhen Cao, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Key Lab. of Materials for High Power Laser (China)
Hongbo He, Shanghai Institute of Optics and Fine Mechanics (China)
Key Lab. of Materials for High Power Laser (China)
Yuanan Zhao, Shanghai Institute of Optics and Fine Mechanics (China)
Key Lab. of Materials for High Power Laser (China)
Anna Sytchkova, ENEA (Italy)


Published in SPIE Proceedings Vol. 11064:
Tenth International Conference on Thin Film Physics and Applications (TFPA 2019)
Junhao Chu; Jianda Shao, Editor(s)

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