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Proceedings Paper

Optical waveguide formed by aluminum nitride thin film on sapphire
Author(s): Xiao Tang; Yifang Yuan; Kobchat Wongchotigul; Michael G. Spencer
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Paper Abstract

We have investigated an optical waveguide formed by aluminum nitride (AlN) thin film on sapphire. A good quality AlN thin film on sapphire substrate was prepared by metal organic chemical vapor deposition in this laboratory. A rutile prism coupler was employed to display the waveguide modes with the wavelength of 632.8, 532.1, 514.5 and 488.0nm. The refractive index and thickness of the waveguide material is obtained by prism-coupler measurement. The dispersion curve of AlN film is given and the dispersion equation is derived. The attenuation in waveguide is evaluated using scattering loss measurements by using a fiber probe in this experiment. The attenuation coefficient alpha is 1.5-2.1 cm-1 various with different sample and the different modes of waveguide. The accuracy of the measurement is discussed.

Paper Details

Date Published: 30 September 1996
PDF: 5 pages
Proc. SPIE 2898, Electronic Imaging and Multimedia Systems, (30 September 1996); doi: 10.1117/12.253402
Show Author Affiliations
Xiao Tang, Howard Univ. (United States)
Yifang Yuan, Howard Univ. (China)
Kobchat Wongchotigul, Howard Univ. (United States)
Michael G. Spencer, Howard Univ. (United States)

Published in SPIE Proceedings Vol. 2898:
Electronic Imaging and Multimedia Systems
Chung-Sheng Li; Robert L. Stevenson; LiWei Zhou, Editor(s)

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