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Micro-ring resonator optical sensor based on silicon and silicon nitride waveguide
Author(s): Jinsheng Ni; Mingyu Li; Jianjun He; Chang Su
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Paper Abstract

In this paper, we compare the sensing sensitivity, the stability and the temperature sensitivity of the micro-ring resonator optical sensor based on silicon waveguide and silicon nitride waveguide. For the silicon waveguide and silicon nitride waveguide single ring, the sensing sensitivities are 1113nm/RIU and 182.64nm/RIU, the resonance wavelength variations are ±12.5pm and ±7.5pm in an hour testing at the ambient temperature and the temperature sensitivities are 0.038nm/K and 0.018nm/K, respectively. . The sensing sensitivity can be improved to 6080.6nm/RIU by cascaded double silicon nitride waveguide rings to produce Vernier effect.

Paper Details

Date Published: 17 May 2019
PDF: 5 pages
Proc. SPIE 11170, 14th National Conference on Laser Technology and Optoelectronics (LTO 2019), 111701Q (17 May 2019); doi: 10.1117/12.2533464
Show Author Affiliations
Jinsheng Ni, Zhejiang Univ. (China)
Mingyu Li, Changchun Univ. of Science and Technology (China)
Jianjun He, Zhejiang Univ. (China)
Chang Su, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 11170:
14th National Conference on Laser Technology and Optoelectronics (LTO 2019)
Jianqiang Zhu; Weibiao Chen; Zhenxi Zhang; Minlin Zhong; Pu Wang; Jianrong Qiu, Editor(s)

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