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Proceedings Paper

Effects of annealing on characteristics of the ITO films
Author(s): Shiyong Huang; Demiao Wang; Gaochao Ren; Kangsheng Chen
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Paper Abstract

Transparent conductive ITO films deposited on glass have been widely used as electrodes of liquid crystal display and other flat panel display. It is well known that the properties of ITO films are strongly effected by depositing condition, especially for the case of the films prepared by reactive sputtering of metallic alloy (indium/tin) targets. In this paper, we present the effects of post-annealing in air and vacuum on the properties of ITO films, such as the conductivity, transparency, crystal structure and thermal stability. By post-annealing, the ITO films with good quality have been obtained, the sheet resistance is as low as 50 (Omega) /square, the transparency as high as 95%.

Paper Details

Date Published: 30 September 1996
PDF: 4 pages
Proc. SPIE 2892, Display Devices and Systems, (30 September 1996); doi: 10.1117/12.253339
Show Author Affiliations
Shiyong Huang, Zhejiang Univ. (China)
Demiao Wang, Zhejiang Univ. (China)
Gaochao Ren, Zhejiang Univ. (China)
Kangsheng Chen, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 2892:
Display Devices and Systems
Eric G. Lean; Zhiren Tian; Bao Gang Wu, Editor(s)

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