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Proceedings Paper

Influences of the buffer layer of TiO2-SiO2 composite film prepared by ion-assisted coevaporation on the properties of indium tin oxide layer coated on soda lime glass
Author(s): Rung-Ywan Tsai; Fang Chung Ho; Mu-Yi Hua
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Paper Abstract

TiO2-SiO2 composite films are sandwiched between indium tin oxide (ITO) layer and soda lime glass as a buffer layer. The TiO2-SiO2 composite and ITO layers are sequentially deposited on glass substrates by ion-assisted electron-beam evaporation in the same coating chamber. Influences of the TiO2-SiO2 composite film with various compositions on the structural, optical, and electrical properties of ITO layer before and after annealing in air at 300 degree(s)C and 500 degree(s)C for 1h are systematically investigated using a x-ray diffractometer, spectrophotometer, and four point probe. Surface roughness of as-deposited and post-annealed samples are measured by talysurface and scanning electron microscopy. Correlations between the electrical properties and the surface roughnesses and structures of ITO coatings are also discussed.

Paper Details

Date Published: 30 September 1996
PDF: 9 pages
Proc. SPIE 2892, Display Devices and Systems, (30 September 1996); doi: 10.1117/12.253331
Show Author Affiliations
Rung-Ywan Tsai, Industrial Technology Research Institute (Taiwan)
Fang Chung Ho, Industrial Technology Research Institute (Taiwan)
Mu-Yi Hua, National Tsing Hua Univ. (Taiwan)


Published in SPIE Proceedings Vol. 2892:
Display Devices and Systems
Eric G. Lean; Zhiren Tian; Bao Gang Wu, Editor(s)

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