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Proceedings Paper

kHz repetition rate operation of excimer laser
Author(s): HongJin Park; Choo Hie Lee
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Paper Abstract

We have developed an excimer laser of compact coaxial type which the one line cross flow fan is only used. At 1 kHz repetitive operation, the average power of KrF laser is 56 watt. In this paper, the design parameters and CR characteristics are investigated for the attainment of the 1 kHz excimer laser. We have obtained the overall efficiency of 1.2% with KrF laser gas. At this time, CR and the variation of laser output are 2.97, +/- 9%, respectively. Laser gas volume and active volume are 10 liter, 1.8 (H) X 1.2 (W) X 30 (L) equals 64.8, respectively.

Paper Details

Date Published: 30 September 1996
PDF: 5 pages
Proc. SPIE 2889, High-Power Lasers: Solid State, Gas, Excimer, and Other Advanced Lasers, (30 September 1996); doi: 10.1117/12.253253
Show Author Affiliations
HongJin Park, Kyung Hee Univ. (South Korea)
Choo Hie Lee, Kyung Hee Univ. (South Korea)


Published in SPIE Proceedings Vol. 2889:
High-Power Lasers: Solid State, Gas, Excimer, and Other Advanced Lasers
Sui-Sheng Mei; Keith A. Truesdell, Editor(s)

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