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Proceedings Paper

Metalorganic chemical vapor deposition of BaTiO3 thin film and its physical properties
Author(s): Hui Wang; J.M. Zeng; Z. H. Wang; M. Wang; S. X. Shang
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Paper Abstract

BaTiO3 is a typical perovskite ferroelectric with unique photorefractive, electro-optic and dielectric properties, the thin film of BaTiO3 is suitable to be used in integrated optic and photorefractive devices. In this paper we report the growth of BaTiO3 thin film on Si (100) substrate by atmospheric pressure metalorganic chemical vapor deposition technique. The souse materials used were Ba(thd)2 and titanium isopropoxied. The substrate temperature was from 620 degrees Celsius to 780 degrees Celsius. The orientation of as-grown BaTiO3 films is dependent on growth temperature. The dielectric constant ((epsilon) ) and loss tangent (tan(delta) ) of BaTiO3 film with (001) orientation are found to be 114 and 0.02, respectively, for a 0.8 micrometer-thick film at room temperature. The remanent polarization (Pr) was 2.3 (mu) C/cm2 and coercive field (Ec) was 14 KV/cm.

Paper Details

Date Published: 30 September 1996
PDF: 3 pages
Proc. SPIE 2896, Photorefractive Materials, (30 September 1996); doi: 10.1117/12.253243
Show Author Affiliations
Hui Wang, Shandong Univ. (China)
J.M. Zeng, Shandong Univ. (China)
Z. H. Wang, Fudan Univ. (China)
M. Wang, Shandong Univ. (China)
S. X. Shang, Shandong Univ. (China)


Published in SPIE Proceedings Vol. 2896:
Photorefractive Materials
Ratnakar R. Neurgaonkar; Tsutomu Shimura; Peixian Ye, Editor(s)

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