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Proceedings Paper

Mechanism of anneal proton exchange to fabricate waveguides on LiNbO3
Author(s): Shufen Chen; BingKun Qin
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Paper Abstract

Anneal proton-exchanged planar waveguides on LiNbO3 are investigated on aspect of crystallography and of optical properties. The strains and stress on crystalline lattices of LiNbO3 due to proton exchange and annealing respective are measured by DDX (Double Diffraction of X-ray) and IR spectrometer. We study theoretically and experimentally the induced photoelastic and piezoelectric effects inside exchanged layer to explore mechanism of anneal. That demonstrates annealing technology being a efficient compensation permits to ameliorate the quality of waveguide and deduced optical propagating loss.

Paper Details

Date Published: 30 September 1996
PDF: 5 pages
Proc. SPIE 2891, Integrated Optoelectronics, (30 September 1996); doi: 10.1117/12.253182
Show Author Affiliations
Shufen Chen, Beijing Institute of Technology (China)
BingKun Qin, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 2891:
Integrated Optoelectronics
Ray T. Chen; Won-Tien Tsang; BingKun Zhou, Editor(s)

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