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Proceedings Paper

Photonic-integrated circuits and components using quantum well intermixing
Author(s): Jian Jun He; Emil S. Koteles; Philip J. Poole; Yan Feng; M. Davis; N. Sylvain Charbonneau; Richard D. Goldberg; Ian V. Mitchell
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Paper Abstract

The monolithic integration of optical components with different functionalities on a single semiconductor wafer requires spatially selective control of bandgap energies. We have developed a simple, post-growth technique based on quantum well intermixing using ion implantation and rapid thermal annealing, which allows multiple selective area bandgap tailoring. Waveguide absorption spectra demonstrate that the bandgap energy can be shifted as much as 90 nm without any excess loss. By depositing a SiO2 layer of different thicknesses in different regions as the implantation mask, quantum wells in different sections of a wafer can be intermixed to different degrees in a single implantation and annealing process. It has also been shown that the heavy-hole and light hole states in the quantum wells can become degenerate at a certain degree of intermixing, which allows the fabrication of polarization insensitive optical amplifiers and electro-absorptive switches. The performance of both active (laser, amplifier, modulator) and passive (waveguide) components produced using this technique will be presented.

Paper Details

Date Published: 30 September 1996
PDF: 8 pages
Proc. SPIE 2891, Integrated Optoelectronics, (30 September 1996); doi: 10.1117/12.253161
Show Author Affiliations
Jian Jun He, National Research Council Canada (Canada)
Emil S. Koteles, National Research Council Canada (Canada)
Philip J. Poole, National Research Council Canada (Canada)
Yan Feng, National Research Council Canada (Canada)
M. Davis, National Research Council Canada (Canada)
N. Sylvain Charbonneau, National Research Council Canada (Canada)
Richard D. Goldberg, Univ. of Western Ontario (Canada)
Ian V. Mitchell, Univ. of Western Ontario (Canada)

Published in SPIE Proceedings Vol. 2891:
Integrated Optoelectronics
Ray T. Chen; Won-Tien Tsang; BingKun Zhou, Editor(s)

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