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Proceedings Paper

Superthin multilayer mirror
Author(s): Yaoning Zhang; ZuHai Cheng; Geng Ku; Zhemin Du; Feng Li
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Paper Abstract

The rule of the distortion introduced by pressure and thermal stresses in the active cooling mirror were proved experimentally. In order to minimize the distortion of a mirror the active cooing mirror should be consisted of a thin faceplate layer, a good heat exchanger layer and a hard rigidity substrate. According to this requirement of a superthin multilayer mirror were designed. Its maximum distortion was only 0.10 micrometers , when the 8.69kw laser beam was incident on the surface of mirror and the coolant pressure was 0.13MPa.

Paper Details

Date Published: 30 September 1996
PDF: 5 pages
Proc. SPIE 2888, Laser Processing of Materials and Industrial Applications, (30 September 1996); doi: 10.1117/12.253150
Show Author Affiliations
Yaoning Zhang, Huazhong Univ. of Science and Technology (China)
ZuHai Cheng, Huazhong Univ. of Science and Technology (China)
Geng Ku, Huazhong Univ. of Science and Technology (China)
Zhemin Du, Huazhong Univ. of Science and Technology (China)
Feng Li, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 2888:
Laser Processing of Materials and Industrial Applications
Shu-Sen Deng; S. C. Wang, Editor(s)

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