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Proceedings Paper

Homogeneity measurement using an infrared interferometer
Author(s): Lei Chen; Jinbang Chen; Shenwang Huang; Guoyou Jin
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Paper Abstract

An interferometric method is used to evaluate the refractive index deviation in the infrared materials. The deformations of the surfaces on the sample are precisely measured by phase shifting interferometer working at 0.6328 micrometers and the errors introduced by the surface deformations are removed from the results. The accuracy of this method reaches the order of 10-5.

Paper Details

Date Published: 3 October 1996
PDF: 5 pages
Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); doi: 10.1117/12.253082
Show Author Affiliations
Lei Chen, Nanjing Univ. of Science and Technology (China)
Jinbang Chen, Nanjing Univ. of Science and Technology (China)
Shenwang Huang, Nanjing Univ. of Science and Technology (China)
Guoyou Jin, Nanjing Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 2899:
Automated Optical Inspection for Industry
Frederick Y. Wu; Shenghua Ye, Editor(s)

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