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Proceedings Paper

Measurement of scanning prism by laser Haidinger interference
Author(s): Zhiwen Yang; XiangLan Xue; Wei An
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Paper Abstract

It is usually difficult to reach an expected testing accuracy using general methods to measure the scanning prism. So this paper puts forward a new method of testing the angular error and pyramidal error of the scanning prism by the Haidinger interference. The relative formulas are deduced, the testing method and instrument are presented in the paper. We also analyzed the testing accuracy. The actual testing accuracy of this method is about 0.5 inches. It is one of the best methods with high accuracy at present. In addition, this method can be used to estimate the surface deviation according to the interferogram. This method belongs to common path interference. The fringe is stable and reliable.

Paper Details

Date Published: 3 October 1996
PDF: 6 pages
Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); doi: 10.1117/12.253075
Show Author Affiliations
Zhiwen Yang, Changchun Institute of Optics and Fine Mechanics (China)
XiangLan Xue, Changchun Institute of Optics and Fine Mechanics (China)
Wei An, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 2899:
Automated Optical Inspection for Industry
Frederick Y. Wu; Shenghua Ye, Editor(s)

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