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Deformation measurements using a stereo microscope
Author(s): Wei-Hung Su; Yu-Heng Lo
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Paper Abstract

A fringe projection technique embedded into a stereo microscope to perform 3D deformation measurements is presented. Fringes projected on the inspected object are blurred by motion, providing additional information to describe the surface deformation. In conjunction to a stereo microscope, to inspect the deformation of micro-objects is available. Only oneshot measurement is required. The full-field property makes it possible to inspect several objects at the same time.

Paper Details

Date Published: 9 September 2019
PDF: 6 pages
Proc. SPIE 11123, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications XIII, 111230T (9 September 2019); doi: 10.1117/12.2530711
Show Author Affiliations
Wei-Hung Su, National Sun Yat-sen Univ. (Taiwan)
Yu-Heng Lo, National Sun Yat-sen Univ. (Taiwan)


Published in SPIE Proceedings Vol. 11123:
Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications XIII
Shizhuo Yin; Ruyan Guo, Editor(s)

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