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Proceedings Paper

Nonlinear control of double Fabry-Perot interferometer
Author(s): Ruogu Zhu; Xuwu Chen
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Paper Abstract

Nonlinear control of double Fabry-Perot interferometer (DFPI) has been investigated. A parallel subsystem of hardware simulation for compensating the influences of atmosphere and other shifts was suggested by author in 1982 but the nonlinear control theoretical analysis and how to improve the performance of DFPI are further discussed in this paper.

Paper Details

Date Published: 3 October 1996
PDF: 6 pages
Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); doi: 10.1117/12.253059
Show Author Affiliations
Ruogu Zhu, China Institute of Metrology (China)
Xuwu Chen, China Institute of Metrology (China)


Published in SPIE Proceedings Vol. 2899:
Automated Optical Inspection for Industry
Frederick Y. Wu; Shenghua Ye, Editor(s)

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