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Proceedings Paper

Compensation for periodic errors in laser interferometer of phase subdivision model
Author(s): Shuan Qi; Wenyi Deng; Gang Liu
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Paper Abstract

When the phase of interference signals is directly subdivided, nonlinear errors, some of which are periodic, will be produced due to the improper assembly and defects of optical elements. In order to compensate for such errors, this paper puts forward a principle of compensation and introduces a device including two (lambda) /4 wave plates or two orthogonal axes and a V-shaped double-plate splitter, by which a beam is divided into two. This device is theoretically proved int his paper.

Paper Details

Date Published: 3 October 1996
PDF: 6 pages
Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); doi: 10.1117/12.253055
Show Author Affiliations
Shuan Qi, Beijing Institute of Machinery (China)
Wenyi Deng, Beijing Institute of Machinery (China)
Gang Liu, Beijing Institute of Machinery (China)

Published in SPIE Proceedings Vol. 2899:
Automated Optical Inspection for Industry
Frederick Y. Wu; Shenghua Ye, Editor(s)

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