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Proceedings Paper

Dynamic error compensation of coordinate measuring machines for fast probing
Author(s): Yuhai Mu; Chensong Dong; Jingbin Guo; Guoxiong Zhang
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Paper Abstract

Due to the demand of shorter cycle times of measurement tasks, CMMs are expected to be used at high speeds. In such measuring process dynamic errors will have greater influence on the accuracy. The dynamic error properties should by analyzed in this case. Considering the analysis of a specific CMM, a dynamic error assessment model is established in this paper. The major deflections at the probe position due to accelerations are obtained by using the finite element calculations and the error data fitting polynomials of three coordinates are established. With a laser interferometer, the dynamic rotation errors of the CMM at the probe position are measured. By comparing the results of the measured dynamic errors using the laser interferometer and the ones obtained by the errors fitting polynomials, it is shown that dynamic error compensation for a specific CMM is possible in a certain degree.

Paper Details

Date Published: 3 October 1996
PDF: 6 pages
Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); doi: 10.1117/12.253031
Show Author Affiliations
Yuhai Mu, Tianjin Univ. (China)
Chensong Dong, Tianjin Univ. (China)
Jingbin Guo, Tianjin Univ. (China)
Guoxiong Zhang, Tianjin Univ. (China)


Published in SPIE Proceedings Vol. 2899:
Automated Optical Inspection for Industry
Frederick Y. Wu; Shenghua Ye, Editor(s)

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