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Proceedings Paper

New concept for roughness measurement: mean surface
Author(s): Chunlong Wei; Mingyi Chen; ZhiJiang Wang
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Paper Abstract

A new concept for roughness measurement is presented in this paper. The new concept is the mean surface that describes the summation of the shape, error and waviness of a profile surface measured by the interferometric microscope. The mean surface is fitted by the Zernike polynomials in a least squares sense. When the mean surface is subtracted from the profile data, the roughness can be calculated. The numerical simulations show that the accuracy is enough high.

Paper Details

Date Published: 3 October 1996
PDF: 5 pages
Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); doi: 10.1117/12.253025
Show Author Affiliations
Chunlong Wei, Shanghai Univ. (China)
Mingyi Chen, Shanghai Univ. (China)
ZhiJiang Wang, Shanghai Institute of Optics and Fine Mechanics (United States)


Published in SPIE Proceedings Vol. 2899:
Automated Optical Inspection for Industry
Frederick Y. Wu; Shenghua Ye, Editor(s)

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