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Proceedings Paper

Application of laser diode fiber alignment in measuring large-scale perpendicularity and parallelism
Author(s): Qun Hao; Rong Liang; Mang Cao; Dacheng Li
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Paper Abstract

In this paper, a system for measuring perpendicularity and parallelism derivation using a laser diode fiber aligned beam and CCD detector is described. A stable aligned laser diode beam is used to form datum planes by rotating scanner equipped with pentagonal prism. Using a linear array CCD detector as the sensing probe, the system can detect the deviation of height related to the datum plane directly and absolutely. The experiment result is shown in the paper.

Paper Details

Date Published: 3 October 1996
PDF: 4 pages
Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); doi: 10.1117/12.253013
Show Author Affiliations
Qun Hao, Tsinghua Univ. (China)
Rong Liang, Tsinghua Univ. (China)
Mang Cao, Tsinghua Univ. (China)
Dacheng Li, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 2899:
Automated Optical Inspection for Industry
Frederick Y. Wu; Shenghua Ye, Editor(s)

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